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Hexamethyldisilazane CAS 999-97-3

Chemical name: Hexamethyldisilazane

Synonymous names:1,1,1-trimethyl-n-(trimethylsilyl)-silanamin;BIS(TRIMETHYLSILYL)AMINE;HEXAMETHYLDISILYLAMINE

CAS No:999-97-3

Molecular formula:C6H19NSi2

Molecular weight:161.39

EINECS No:213-668-5

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Structural formula  

Product Description

Items

Specifications

Appearance

Colorless transprant liquid

Assay,%

99.0 min.

Boiling point(℃)

125

Flash point(℃)

8.0

Color

20max

Chlorion

50 max

 

Properties and Usage:

Hexamethyldisilazane (CAS 999-97-3), referred to as HMDS, is an important organosilicon compound used in semiconductors, chemical synthesis and industrial surface treatment.

1. Semiconductor industry and surface treatment

HMDS is mainly used in the semiconductor industry for cleaning and surface hydrophobic treatment of silicon wafers. It improves the hydrophobicity of the silicon surface through silanization reaction, prevents the adsorption of moisture and pollutants, and thus enhances the performance of the wafer.

 

2. Synthesis of organosilicon chemicals

As an important precursor of organosilicon chemicals, HMDS is used to synthesize organosilicon resins, silicone oils and silane coupling agents.

 

3. Vapor deposition (CVD)

In the vapor deposition process, HMDS is often used as a source material for the deposition of silicon thin films, especially in the manufacture of integrated circuits and microelectronic devices, to ensure the high performance of the product by improving the quality of the film layer.

 

4. Anti-corrosion and surface activity

HMDS can be used as an anti-corrosion agent in high-demand protection fields such as aerospace and automobiles to protect metal surfaces from oxidation. It is also used as a surfactant to improve the hydrophobicity and corrosion resistance of various materials (such as glass, metal, and plastic).

 

5. Organic synthesis and polymer material modification

In organic synthesis, HMDS is used as a protective agent or modifier, especially in the modification process of polymer materials such as rubber and plastic, to enhance the high temperature resistance and oxidation resistance of the material, and is used in the production of high-performance coatings and adhesives.

 

Storage conditions: In a dry atmosphere, the product should be sealed and stored

Packing: This product is packed in 25kg drums, and it can also be customized according to customers' requirements

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